ON THE DETERMINATION OF THE SPATIAL-DISTRIBUTION OF DEEP CENTERS IN SEMICONDUCTING THIN-FILMS FROM CAPACITANCE TRANSIENT SPECTROSCOPY

被引：175
作者：
ZOHTA, Y
WATANABE, MO
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 03期
关键词：
D O I：
10.1063/1.330683
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：1809 / 1811
页数：3
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