THE GROWTH OF POLYCRYSTALLINE SILICON ON MOLYBDENUM, TANTALUM, TUNGSTEN, AND THEIR DISILICIDES

被引：7

作者：

CAMPISI, GJ ^{[1
]}

BEVOLO, AJ ^{[1
]}

SHANKS, HR ^{[1
]}

SCHMIDT, FA ^{[1
]}

机构：

[1] IOWA STATE UNIV SCI & TECHNOL,US DOE,AMES LAB,AMES,IA 50011

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 03期

关键词：

D O I：

10.1063/1.331638

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1714 / 1719

页数：6

共 17 条

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[8]

DHEURLE FM, 1980, J APPL PHYS, V51, P5976, DOI 10.1063/1.327517

[9] POLYCRYSTALLINE SILICON FILMS ON ALUMINUM SHEETS FOR SOLAR CELL APPLICATION [J].

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[10]

HOPKINS EN, 1966, ORNLTM1161 REP

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