DEPENDENCE OF SEGREGATED MICROSTRUCTURE IN SPUTTER-DEPOSITED COCR FILM ON DEPOSITION CONDITIONS

被引：18
|
作者：
MASUYA, H [1 ]
AWANO, H [1 ]
机构：
[1] SONY CORP,INFORMAT SYST RES CTR,YOKOHAMA,KANAGAWA 240,JAPAN
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1987年 / 23卷 / 05期
关键词：
D O I：
10.1109/TMAG.1987.1065612
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：2064 / 2066
页数：3
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