HIGH-VACUUM MOLECULAR-BEAM EPITAXY FOR THE GROWTH OF IV-VI COMPOUNDS

被引:11
作者
FRANK, N [1 ]
VOITICEK, A [1 ]
CLEMENS, H [1 ]
HOLZINGER, A [1 ]
BAUER, G [1 ]
机构
[1] MET WERKE PLANSEE, A-6600 REUTTE, AUSTRIA
关键词
D O I
10.1016/0022-0248(93)90036-V
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The molecular beam epitaxy growth of IV-VI compounds using background pressures of about 10(-7) Torr (during growth) instead of ultra-high vacuum background conditions is investigated. A simple high vacuum molecular beam epitaxy system is described. Calculations of the growth rate for the binary and pseudobinary compounds are compared with experimental data. Results on the growth of PbTe, PbSe and dilute magnetic Pb1-xMnxTe and Pb1-xMnxSe epitaxial films as well as on PbTe/Pb1-xMnxTe and PbSe/Pb1-xMnxSe multi-quantum-well structures are presented. Structural properties have been checked by X-ray diffraction. The electronic properties are investigated by conductivity and Hall effect measurements. These data are compared with that of samples grown under ultra-high vacuum conditions.
引用
收藏
页码:293 / 304
页数:12
相关论文
共 34 条
[1]   MAGNETOOPTICAL PROPERTIES OF SEMIMAGNETIC LEAD CHALCOGENIDES [J].
BAUER, G ;
PASCHER, H ;
ZAWADZKI, W .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1992, 7 (06) :703-723
[2]   IV-VI COMPOUND COMPOSITIONAL AND DOPING SUPERLATTICES [J].
BAUER, G .
SUPERLATTICES AND MICROSTRUCTURES, 1986, 2 (06) :531-538
[3]   EQUILIBRIUM COMPOSITION OF SELENIUM VAPOR THERMODYNAMICS OF VAPORIZATION OF HGSE CDSE AND SRSE [J].
BERKOWITZ, J ;
CHUPKA, WA .
JOURNAL OF CHEMICAL PHYSICS, 1966, 45 (11) :4289-+
[4]   PARTIAL PRESSURES IN EQUILIBRIUM WITH GROUP 4 TELLURIDES .1. OPTICAL ABSORPTION METHOD + RESULTS FOR PBTE [J].
BREBRICK, RF ;
STRAUSS, AJ .
JOURNAL OF CHEMICAL PHYSICS, 1964, 40 (11) :3230-&
[5]   GROWTH OF PBTE/PB1-XMNXTE QUANTUM WELL STRUCTURES BY MOLECULAR-BEAM EPITAXY [J].
CLEMENS, H ;
WEILGUNI, PC ;
STROMBERGER, U ;
BAUER, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (06) :3197-3199
[6]   EPITAXIAL-GROWTH OF PB1-XGEXTE FILMS AND OF PBTE/PB1-XGEXTE SUPERLATTICES [J].
CLEMENS, H ;
OFNER, P ;
KRENN, H ;
BAUER, G .
JOURNAL OF CRYSTAL GROWTH, 1987, 84 (04) :571-576
[7]   EPITAXIAL-GROWTH OF PBTE ON (111)BAF2 AND (100)GAAS [J].
CLEMENS, H ;
KRENN, H ;
TRANTA, B ;
OFNER, P ;
BAUER, G .
SUPERLATTICES AND MICROSTRUCTURES, 1988, 4 (4-5) :591-596
[8]   HOT-WALL EPITAXY SYSTEM FOR THE GROWTH OF MULTILAYER IV-VI-COMPOUND HETEROSTRUCTURES [J].
CLEMENS, H ;
FANTNER, EJ ;
BAUER, G .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1983, 54 (06) :685-689
[9]  
CLEMENS H, 1987, THESIS MONTANUNIVERS
[10]   GROWTH OF PB1-XMNXTE THIN-FILMS BY HOT-WALL EPITAXY [J].
ELSINGER, G ;
PALMETSHOFER, L ;
LOPEZOTERO, A .
NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS, 1983, 2 (06) :1869-1874