STUDY OF INSULATOR MATERIALS USED IN ISFET GATES

被引：26
作者：
COHEN, RM
HUBER, RJ
JANATA, J
URE, RW
MOSS, SD
机构：
来源：
THIN SOLID FILMS | 1978年 / 53卷 / 02期
关键词：
D O I：
10.1016/0040-6090(78)90031-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：169 / 173
页数：5
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共 14 条
[1]   DEVELOPMENT, OPERATION, AND APPLICATION OF ION-SENSITIVE FIELD-EFFECT TRANSISTOR AS A TOOL FOR ELECTROPHYSIOLOGY [J].
BERGVELD, P .
IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1972, BM19 (05) :342-&
[2]   IONIC TRANSPORT IN AMORPHOUS OXIDES [J].
DOREMUS, RH .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (02) :181-&
[3]  
Grove A S, 1967, PHYS TECHNOLOGY SEMI
[4]   WATER CONTAMINATION IN THERMAL OXIDE ON SILICON [J].
HOLMBERG, GL ;
KUPER, AB ;
MIRALDI, FD .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (05) :677-+
[5]  
JANATA J, 1976, BIOMED ENG, V11, P241
[6]  
LOEB LB, 1941, PHYS REV, V60, P715
[7]   BEHAVIOR OF VARIOUS INSULATING FILMS IN HIGH-TEMPERATURE WATER AND MOISTURE [J].
MAEDA, K ;
SATO, J ;
BAN, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (05) :729-736
[8]   INTEGRATED FIELD-EFFECT ELECTRODE FOR BIOPOTENTIAL RECORDING [J].
MATSUO, T ;
WISE, KD .
IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1974, BM21 (06) :485-487
[9]   ANODIC OXIDATION OF SILICON - EFFECTS OF WATER ON OXIDE PROPERTIES [J].
NANNONI, R ;
MUSSELIN, MJ .
THIN SOLID FILMS, 1970, 6 (06) :397-&
[10]   OXIDE-SOLUTION INTERFACE [J].
PERRAM, JW ;
HUNTER, RJ ;
WRIGHT, HJL .
AUSTRALIAN JOURNAL OF CHEMISTRY, 1974, 27 (03) :461-475
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