FORMING ELECTRICAL INTERCONNECTIONS THROUGH SEMICONDUCTOR WAFERS

被引：29

作者：

ANTHONY, TR

机构：

来源：

关键词：

D O I：

10.1063/1.329392

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5340 / 5349

页数：10

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[6]

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[8]

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[9]

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