ETCHING OF SURFACES WITH 8-KEV ARGON IONS

被引：52

作者：

CUNNINGHAM, RL

HAYMANN, P

LECOMTE, C

MOORE, WJ

TRILLAT, JJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1960年 / 31卷 / 05期

关键词：

D O I：

10.1063/1.1735705

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：839 / 842

页数：4

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