TRANSIENT CAPACITANCE SPECTROSCOPY OF SEMICONDUCTOR-INSULATOR INTERFACE STATES - THERMALLY ACTIVATED CAPTURE CROSS-SECTION OF SI-SIO2 INTERFACE STATES

被引:12
作者
KAMIENIECKI, E [1 ]
GOMMA, N [1 ]
KLOC, A [1 ]
NITECKI, R [1 ]
机构
[1] POLISH ACAD SCI,INST PHYS,WARSAW 42,POLAND
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期
关键词
D O I
10.1116/1.570984
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:883 / 887
页数:5
相关论文
共 17 条
[1]  
DUELING H, 1972, SOLID STATE ELECTRON, V15, P559
[2]   ENERGY DEPENDENCE OF ELECTRICAL PROPERTIES OF INTERFACE STATES IN SI-SIO2 INTERFACES [J].
FAHRNER, W ;
GOETZBERGER, A .
APPLIED PHYSICS LETTERS, 1970, 17 (01) :16-+
[3]  
GOETZBERGER A, 1976, CRC REP, V1, P1
[4]  
JOHNSON NM, 1978, PHYSICS SIO2 ITS INT, P421
[5]   OPTICALLY-ACTIVE INTERFACE STATES IN MOS STRUCTURES [J].
KAMIENIECKI, E ;
NITECKI, R ;
SWIATEK, A .
SOLID-STATE ELECTRONICS, 1980, 23 (01) :79-85
[6]   ION-ELECTRON (CONFIGURATIONAL) INTERFACE STATES IN MOS STRUCTURES [J].
KAMIENIECKI, E .
APPLIED PHYSICS LETTERS, 1979, 35 (10) :807-809
[7]   DEEP-LEVEL TRANSIENT SPECTROSCOPY - NEW METHOD TO CHARACTERIZE TRAPS IN SEMICONDUCTORS [J].
LANG, DV .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (07) :3023-3032
[8]   FAST CAPACITANCE TRANSIENT APPARATUS - APPLICATION TO ZNO AND O CENTERS IN GAP PARANORMAL JUNCTIONS [J].
LANG, DV .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (07) :3014-3022
[9]   SURFACE-GENERATION STATISTICS AND ASSOCIATED THERMAL CURRENTS IN METAL-OXIDE-SEMICONDUCTOR STRUCTURES [J].
MAR, HA ;
SIMMONS, JG .
PHYSICAL REVIEW B, 1975, 11 (02) :775-783
[10]  
MILLER GL, 1977, ANNU REV MATER SCI, P377