A 1-MU-M BIPOLAR VLSI TECHNOLOGY

[1] MICROSTRUCTURAL AND ELECTRICAL PROPERTIES OF THIN PTSI FILMS AND THEIR RELATIONSHIPS TO DEPOSITION PARAMETERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (10) : 1337 - 1347

[2] ARLEDGE LA, UNPUBLISHED

[3] DAVIS M, 1978, MAY ECS M, V78

[4] FABRICATION OF INTEGRATED INJECTION LOGIC WITH ELECTRON-BEAM LITHOGRAPHY AND ION-IMPLANTATION [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (04) : 402 - 407

[5] EVANS SA, 1979, IEEE T ELECTRON DEVI, V26, P402

[6] 2ND-GENERATION 12L-MTL - 20-NS PROCESS-STRUCTURE [J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1977, 12 (02) : 93 - 101

[7] HERMAN JM, 1977 INT EL DEV M DI, P262

[8] SLOAN BJ, 1979 INT EL DEV M DI, P324

[9] TANG DD, 1979 INT EL DEV M DI, P201

[10] VARNELL GL, 1976, OCT SPE C PHOT PRINC

[1] MICROSTRUCTURAL AND ELECTRICAL PROPERTIES OF THIN PTSI FILMS AND THEIR RELATIONSHIPS TO DEPOSITION PARAMETERS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (10) : 1337 - 1347

[2] ARLEDGE LA, UNPUBLISHED

[3] DAVIS M, 1978, MAY ECS M, V78

[4] FABRICATION OF INTEGRATED INJECTION LOGIC WITH ELECTRON-BEAM LITHOGRAPHY AND ION-IMPLANTATION [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (04) : 402 - 407

[5] EVANS SA, 1979, IEEE T ELECTRON DEVI, V26, P402

[6] 2ND-GENERATION 12L-MTL - 20-NS PROCESS-STRUCTURE [J]. IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1977, 12 (02) : 93 - 101

[7] HERMAN JM, 1977 INT EL DEV M DI, P262

[8] SLOAN BJ, 1979 INT EL DEV M DI, P324

[9] TANG DD, 1979 INT EL DEV M DI, P201

[10] VARNELL GL, 1976, OCT SPE C PHOT PRINC