AN INVESTIGATION OF THE VACUUM UV SPECTRA OF INDUCTIVELY COUPLED RF PLASMAS EXCITED IN INERT-GASES AS A FUNCTION OF SOME OF THE OPERATING PARAMETERS

被引：31

作者：

CLARK, DT

DILKS, A

机构：

来源：

关键词：

Compendex;

D O I：

10.1002/pol.1980.170180410

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

SPECTROSCOPY, ULTRAVIOLET

引用

页码：1233 / 1246

页数：14

共 10 条

CLARK, DT ;

DILKS, A .

CLARK, DT ;

DILKS, A .

[3]

CLARK DT, 1978, POLYMER SURFACES, pCH9

[4]

CORBIN RG, 1976, QU32 NAT PHYS LAB UK

[5] ABSORPTION CROSS-SECTIONS IN THE VACUUM ULTRA-VIOLET .3. METHANE [J].

DITCHBURN, RW .

[6]

FREEMAN GHC, 1970, QU10 NAT PHYS LAB UK

[7]

HOLLAHAN JR, 1974, TECHNIQUES APPLICATI

OKABE, H .

[9]

Samson J. A. R., 1967, TECHNIQUES VACUUM UL

[10]

SHEN M, 1976, PLASMA CHEM POLYMERS