TITANIUM-DIOXIDE DIELECTRIC FILMS FORMED BY RAPID THERMAL-OXIDATION

被引：111
作者：
BURNS, GP
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 05期
关键词：
D O I：
10.1063/1.342856
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：2095 / 2097
页数：3
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