0.5-MU-M CMOS DEVICES AND CIRCUITS FABRICATED USING SYNCHROTRON X-RAY-LITHOGRAPHY

被引：0
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作者：
WANG, LK
HSU, CH
SEEGER, D
SILVERMAN, J
ZICHERMAN, D
HU, CK
ACOSTA, R
VISWANATHAN, R
WARLAUMONT, J
WILSON, A
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来源：
1989 SYMPOSIUM ON VLSI TECHNOLOGY: DIGEST OF TECHNICAL PAPERS | 1989年
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：11 / 12
页数：2
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