SOLID-STATE PHOTOCHEMISTRY OF PLATINUM(II) METHYLAZIDE COMPLEXES AS THIN-FILMS ON SI (111) SURFACES - PHOTOLITHOGRAPHY OF PLATINUM FILMS

被引：13

作者：

BLAIR, SL ^{[1
]}

HUTCHINS, J ^{[1
]}

HILL, RH ^{[1
]}

BICKLEY, DG ^{[1
]}

机构：

[1] UNIV COLL CARIBOO,DEPT PHYS SCI,KAMLOOPS V2C 5N3,BC,CANADA

来源：

JOURNAL OF MATERIALS SCIENCE | 1994年 / 29卷 / 08期

关键词：

D O I：

10.1007/BF01154692

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The solid-state photochemistry of L2Pt(Me)(N3) (L = PPh3, PEt3, dppe/2) have been investigated on Si (111) surfaces. Photolysis of an amorphous thin film of L2Pt(Me)(N3) results in the loss of all ligands. This occurs via a single photon process with no detectable thermally stable intermediate. The resultant films are primarily platinum metal although some phosphine-containing impurity remains. The final analysis leads to formulations of the films as Pt(dppe)0.06, Pt(PPh3)0.12 and Pt(PEt3)0.07. The thicknesses of the platinum films ranged from 150 nm to less than 25 nm. This process was shown to be compatible with standard lithography methods by the production of 3 mum wires on Si (111) by photolithography.

引用

页码：2143 / 2146

页数：4

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