SURFACE CONDUCTION IN SHORT-CHANNEL MOS DEVICES AS A LIMITATION TO VLSI SCALING

被引:56
作者
EITAN, B [1 ]
FROHMANBENTCHKOWSKY, D [1 ]
机构
[1] HEBREW UNIV JERUSALEM,SCH APPL SCI & TECHNOL,JERUSALEM 91000,ISRAEL
关键词
D O I
10.1109/T-ED.1982.20693
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:254 / 266
页数:13
相关论文
共 29 条
[11]   DESIGN AND PERFORMANCE OF MICRON-SIZE DEVICES [J].
KLAASSEN, FM .
SOLID-STATE ELECTRONICS, 1978, 21 (03) :565-571
[12]   COMPUTER-ANALYSIS OF PUNCH-THROUGH IN MOSFETS [J].
KOTANI, N ;
KAWAZU, S .
SOLID-STATE ELECTRONICS, 1979, 22 (01) :63-+
[13]   ANALYSIS OF THRESHOLD VOLTAGE FOR SHORT-CHANNEL IGFETS [J].
LEE, HS .
SOLID-STATE ELECTRONICS, 1973, 16 (12) :1407-1417
[14]   CHARACTERISTICS AND LIMITATION OF SCALED-DOWN MOSFETS DUE TO 2-DIMENSIONAL FIELD-EFFECT [J].
MASUDA, H ;
NAKAI, M ;
KUBO, M .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (06) :980-986
[15]  
MERCKEL G, 1978, IEDM, P476
[16]  
MOTT NF, 1940, ELECTRONIC PROCESS I
[17]  
MURAMOTO S, 1975, ELECTRON COMMUN JPN, V58, P64
[18]   SUB-MICRON CHANNEL MOSFETS LOGIC UNDER PUNCHTHROUGH [J].
NAKAMURA, T ;
YAMAMOTO, M ;
ISHIKAWA, H ;
SHINODA, M .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1978, 13 (05) :572-577
[19]   MODULATION OF SPACE-CHARGE-LIMITED CURRENT FLOW IN INSULATED-GATE FIELD-EFFECT TETRODES [J].
RICHMAN, P .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1969, ED16 (09) :759-+
[20]   PUNCHTHROUGH CURRENTS IN SHORT-CHANNEL MOST DEVICES [J].
STUART, RA ;
ECCLESTON, W .
ELECTRONICS LETTERS, 1973, 9 (25) :586-588