EFFECT OF SURFACE-ROUGHNESS ON NICKEL FILM PREPARED BY SPUTTERING

被引：0
|
作者：
DUBEY, GC
SRIVASTAVA, VK
BAL, M
SHARMA, GP
机构：
来源：
INDIAN JOURNAL OF PURE & APPLIED PHYSICS | 1991年 / 29卷 / 06期
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中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Properties of nickel film prepared on glass substrate with different surface roughnesses by sputtering are studied. The surface resistivity and temperature coefficient of resistances have been measured and reported. The effect of annealing of such films has also been discussed keeping in view its use on ceramic substrate as a terminating load for dual mode phase shifter.
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页码：415 / 417
页数：3
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