SILICON EPITAXY FROM MIXTURES OF SIH4 AND HC1

被引：38
作者：
BLOEM, J
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1970年 / 117卷 / 11期
关键词：
D O I：
10.1149/1.2407330
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：1397 / &
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