STRESS IN CO-AU ALLOY FILMS

被引：2

作者：

KLOKHOLM, E

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1970年 / 7卷 / 01期

关键词：

D O I：

10.1116/1.1315787

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：175 / &

共 9 条

[1] INTERNAL STRESSES
BUCKEL, W
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (04): : 606 - +
[2] FEDER R, PRIVATE COMMUNICATIO
[3] Hoffman R. W., 1966, PHYS THIN FILMS, VVol. 3, pp. 211
[4] KLEMENT W, 1963, T METALL SOC AIME, V227, P965
[5] AN APPARATUS FOR MEASURING STRESS IN THIN FILMS
KLOKHOLM, E
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1969, 40 (08) : 1054 - +
[6] INTRINSIC STRESS IN EVAPORATED METAL FILMS
KLOKHOLM, E
BERRY, BS
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (08) : 823 - &
[7] METASTABLE ALLOY FILMS
MADER, S
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1965, 2 (01): : 35 - &
[8] METASTABLE EVAPORATED THIN FILMS OF CU-AG AND CO-AU ALLOYS .I. OCCURRENCE AND MORPHOLOGY OF PHASES
MADER, S
NOWICK, AS
WIDMER, H
[J]. ACTA METALLURGICA, 1967, 15 (02): : 203 - +
[9] A HARD-SPHERE MODEL TO SIMULATE ALLOY THIN FILMS
NOWICK, AS
MADER, SR
[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1965, 9 (5-6) : 358 - &