FORMATION AND OXIDATION OF POROUS SILICON BY ANODIC REACTION

被引：47

作者：

ARITA, Y

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1978年 / 45卷 / 01期

关键词：

D O I：

10.1016/0022-0248(78)90467-0

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：383 / 392

页数：10

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[10] ETCH CHANNEL FORMATION DURING ANODIC DISSOLUTION OF N-TYPE SILICON IN AQUEOUS HYDROFLUORIC ACID [J].

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