SURFACE, IN-DEPTH, AND QUANTITATIVE-ANALYSIS BY SECONDARY ION MASS-SPECTROMETRY (SIMS)

被引：3
作者：
MORABITO, JM [1 ]
机构：
[1] BELL TEL LABS INC,ALLENTOWN,PA 18103
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1974年 / 11卷 / 01期
关键词：
D O I：
10.1116/1.1318601
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：297 / 297
页数：1
相关论文
共 21 条
[1]   THERMODYNAMIC APPROACH TO QUANTITATIVE INTERPRETATION OF SPUTTERED ION MASS-SPECTRA [J].
ANDERSEN, CA ;
HINTHORNE, JR .
ANALYTICAL CHEMISTRY, 1973, 45 (08) :1421-1438
[2]  
BLAISE G, 1968, CR ACAD SCI B PHYS, V266, P1525
[3]  
CASTAING R, 1966, CR ACAD SCI B PHYS, V262, P1008
[4]  
CASTAING R, 1965, OPTIQUE RAYONS X MIC
[5]  
Castaing R., 1962, J MICROSCOPIE, V1, P395
[6]   ION MICROPROBE MASS SPECTROMETRIC DETERMINATION OF OXYGEN IN COPPER [J].
EVANS, CA .
ANALYTICAL CHEMISTRY, 1970, 42 (11) :1130-&
[7]  
HENNEQUIN JF, 1967, CR ACAD SCI B PHYS, V265, P312
[8]  
HERNANDEZ R, 1970, METHODES PHYSIQUES A, V6, P411
[9]   Ion and electron-cylindrical lenses and prisms. I. [J].
Herzog, Richard .
ZEITSCHRIFT FUR PHYSIK, 1934, 89 (7-8) :447-473
[10]  
HOFKER WK, 1973, RADIAT EFF, V17, P83
123