XPS STUDY OF IRON SURFACE-LAYERS IMPLANTED WITH BOTH TITANIUM AND NITROGEN

被引：0
作者：
FUKUI, Y
NISHIMURA, O
YABE, K
IWAKI, M
机构：
[1] GOVT IND DEV LABS,SAPPORO,HOKKAIDO 004,JAPAN
[2] RIKEN,WAKO,SAITAMA 35101,JAPAN
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1991年 / 59卷
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D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Iron plates were implanted at room temperature to doses of 1 x 10(17) ions/cm2 with 150 keV.Ti ions and subsequently with 20, 45 or 75 keV N ions at the same dose. Chemical bonding states and depth profiles of Ti, N and C in the implanted layer were measured by XPS. Changes in the crystal structure of implanted layers were investigated by X-ray diffraction spectrometry. Ti which was present in the metal state after Ti implantation was changed to Ti nitride inside the N distributions and further a part of the Fe-Ti solid solution disappeared. Implanted N formed Ti or Fe nitrides. C which was incorporated from vacuum at the time of Ti implantation showed no change of chemical bonding states after N ion implantation and was present in the state of Fe-carbide.
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页码：812 / 816
页数：5
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