OPTICAL CHARACTERIZATION OF STRESS IN NARROW GAAS STRIPES ON PATTERNED SI SUBSTRATES

被引：17

作者：

DEBOECK, J ^{[1
]}

DENEFFE, K ^{[1
]}

CHRISTEN, J ^{[1
]}

ARENT, DJ ^{[1
]}

BORGHS, G ^{[1
]}

机构：

[1] TECH UNIV BERLIN,D-1000 BERLIN,FED REP GER

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 04期

关键词：

D O I：

10.1063/1.101894

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：365 / 367

页数：3

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