PHOTOELECTRIC MEASUREMENTS ON VAPOR-DEPOSITED TANTALUM FILMS

被引：2
|
作者：
BAUDER, U [1 ]
ALEX, K [1 ]
FROMM, E [1 ]
机构：
[1] MAX PLANCK INST MET FORSCH,INST WERKSTOFFWISSENSCH,D-7000 STUTTGART 1,FED REP GER
来源：
THIN SOLID FILMS | 1977年 / 46卷 / 03期
关键词：
D O I：
10.1016/0040-6090(77)90179-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：229 / 237
页数：9
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