HIGH-ENERGY HEAVY-ION IRRADIATION OF CHROMIUM FILMS

被引：18

作者：

JAIN, A ^{[1
]}

LOGANATHAN, S ^{[1
]}

JAIPAL ^{[1
]}

KANJILAL, D ^{[1
]}

MEHTA, GK ^{[1
]}

机构：

[1] NUCL SCI CTR,NEW DELHI 110067,INDIA

来源：

VACUUM | 1995年 / 46卷 / 04期

关键词：

D O I：

10.1016/0042-207X(94)00081-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have studied the modification of chromium coatings by nickel ion beams at a high energy (75 MeV) so that the range of the ions is many times the film thickness, which is of the order of 1 mu m. At this energy, the rate of energy loss of ions is predicted to be fairly uniform over the entire thickness of the coating. The coating hardness increases significantly, even at moderate doses. The effect is stronger when the film deposition temperature is lower.

引用

页码：369 / 371

页数：3

共 5 条

[1]

DURRANI SA, 1987, SOLID STATE NUCLEAR

[2] STRESSES IN THIN-FILMS - RELEVANCE OF GRAIN-BOUNDARIES AND IMPURITIES [J].