INVESTIGATION OF RADIATION-DAMAGE BY X-RAY-DIFFRACTION

X-ray diffraction methods allow the investigation of point defects and small defect agglomerates or precipitates, i.e. defect sizes ranging from the atomic level up to large dislocation loops that are well above the visibility limit of the transmission electron microscope. The discussion includes measurements of the change of the lattice parameter and differential dilatometry as well as the diffuse scattering. Especially the diffuse scattering at small q-values, i.e. close to Bragg reflections (Huang diffuse scattering) and at small angles (small angle X-ray scattering), allows a rather straightforward interpretation and is discussed in some detail. The power and the limitations of the methods are illustrated through examples of defects in metals and semiconductors. Finally the application of the anomalous scattering and the investigation of the extended X-ray absorption fine structure are discussed, as synchrotron radiation makes these techniques generally available.