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THERMAL HYSTERESIS OF HIGH-TEMPERATURE RESISTIVITY IN INDIUM-TIN-OXIDE FILMS
被引：0
作者：
ADACHI, K
HIRAYAMA, T
SAKATA, H
机构：
来源：
NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN
|
1991年
/
99卷
/
04期
关键词：
ITO FILMS;
CHEMICAL SPRAY PYROLYSIS;
ELECTRICAL RESISTIVITY;
THERMAL HYSTERESIS;
D O I：
暂无
中图分类号：
TQ174 [陶瓷工业];
TB3 [工程材料学];
学科分类号：
0805 ;
080502 ;
摘要：
Indium-tin-oxide (ITO) films were prepared by the chemical spray pyrolysis method using InCl3.6H2O and SnCl4.xH2O (x = 3-5) as starting materials. The film with a minimum resistivity of 1.23 x 10(-3) OMEGA.cm was obtained for tin doping, Sn/In = 5 at %. Resistivity of 50 nm thick films showed hysteresis phenomena in heat cycles repeated at temperatures between 100-degrees and 500-degrees-C in O2 and Ar gases. The hysteresis results were discussed in terms of desorption of H2O from In2O3-H2O complexes, superposing desorption of adsorbed O2 from the films.
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页码：334 / 337
页数：4
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