ION PLATING PROCESSES - DESIGN CRITERIA AND SYSTEM OPTIMIZATION

[1] BROWN SC, 1966, BASIC DATA PLASMA PH

[2] CHAMBERS DL, 1971, RES DEV, V22, P32

[3] CHUNG PM, 1975, ELECTRIC PROBES STAT

[4] ELSHERBINEY M, 1974, THESIS U SALFORD

[5] PLASMA CHARACTERIZATION IN SPUTTERING PROCESSES USING THE LANGMUIR PROBE TECHNIQUE [J]. THIN SOLID FILMS, 1980, 68 (02) : 381 - 392

[6] THE FRONT - BACK THICKNESS RATIO OF ION-PLATED FILMS [J]. VACUUM, 1984, 34 (05) : 591 - 592

[7] SOME FUNDAMENTAL-ASPECTS OF GLOW-DISCHARGES IN PLASMA-ASSISTED PROCESSES [J]. SURFACE & COATINGS TECHNOLOGY, 1987, 33 (1-4) : 17 - 29

[8] FANCEY KS, IN PRESS SURF COAT T

[9] HEATING EFFECTS IN IONIZATION-ASSISTED PROCESSES [J]. THIN SOLID FILMS, 1984, 117 (04) : 261 - 267

[10] MATTHEWS A, 1982, 1982 P C ION ASS SUR, P61

[1] BROWN SC, 1966, BASIC DATA PLASMA PH

[2] CHAMBERS DL, 1971, RES DEV, V22, P32

[3] CHUNG PM, 1975, ELECTRIC PROBES STAT

[4] ELSHERBINEY M, 1974, THESIS U SALFORD

[5] PLASMA CHARACTERIZATION IN SPUTTERING PROCESSES USING THE LANGMUIR PROBE TECHNIQUE [J]. THIN SOLID FILMS, 1980, 68 (02) : 381 - 392

[6] THE FRONT - BACK THICKNESS RATIO OF ION-PLATED FILMS [J]. VACUUM, 1984, 34 (05) : 591 - 592

[7] SOME FUNDAMENTAL-ASPECTS OF GLOW-DISCHARGES IN PLASMA-ASSISTED PROCESSES [J]. SURFACE & COATINGS TECHNOLOGY, 1987, 33 (1-4) : 17 - 29

[8] FANCEY KS, IN PRESS SURF COAT T

[9] HEATING EFFECTS IN IONIZATION-ASSISTED PROCESSES [J]. THIN SOLID FILMS, 1984, 117 (04) : 261 - 267

[10] MATTHEWS A, 1982, 1982 P C ION ASS SUR, P61