PRODUCTION OF SILICON-NITRIDE BY GAS NITRIDATION OF ULTRA-FINE SILICON POWDER

被引：15

作者：

ISHIZAKI, K

YUMOTO, S

TANAKA, K

机构：

来源：

JOURNAL OF MATERIALS SCIENCE | 1988年 / 23卷 / 05期

关键词：

D O I：

10.1007/BF01115725

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1813 / 1816

页数：4

共 11 条

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