A ROOM-TEMPERATURE METHOD FOR THE PREPARATION OF ULTRATHIN SIOX FILMS FROM LANGMUIR-BLODGETT LAYERS

被引：97

作者：

MIRLEY, CL

KOBERSTEIN, JT

机构：

[1] Department of Chemical Engineering, Institute of Materials Science U-136, University of Connecticut, Storrs, Connecticut

来源：

LANGMUIR | 1995年 / 11卷 / 04期

关键词：

D O I：

10.1021/la00004a001

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Langmuir-Blodgett films prepared from diacid-terminated poly(dimethylsiloxane) can be transformed to SiOx ultrathin films (t = 14 Angstrom) by exposure to UV-ozone at room temperature and atmospheric pressure. The kinetics of the reaction is followed by grazing-incidence infrared spectroscopy and the film composition is determined by angle-resolved X-ray photoelectron spectroscopy. The results show that UV-ozone treatment oxidizes 90% of the methyl side groups to hydroxyl and bridging oxygen species. This technique represents a novel low temperature route for the preparation of ultrathin SiOx films from polysiloxane starting materials.

引用

页码：1049 / 1052

页数：4

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