ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITION OF PLATINUM AND GOLD - HETEROGENEOUS DEPOSITION AND SURFACE-CHEMISTRY

被引:10
作者
NORTON, PR [1 ]
YOUNG, PA [1 ]
CHENG, Q [1 ]
DRYDEN, N [1 ]
PUDDEPHATT, RJ [1 ]
机构
[1] UNIV WESTERN ONTARIO, DEPT CHEM, LONDON N6A 5B7, ONTARIO, CANADA
基金
加拿大自然科学与工程研究理事会;
关键词
D O I
10.1016/0039-6028(94)90389-1
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Clean Pt(111) chemisorbs both cis-(CH3)2Pt(CH3NC)2[HPt] and CF3AuCH3NC[FMG]. Ligand-metal bond cleavage occurs even at low temperature, yielding adsorbed CH3NC. Further dissociation of the ligand to H-2 and HCN occurs on heating. On Au, FMG chemisorption again occurs, and desorption of CH3NC is detected, but no H-2 or HCN are formed, consistent with the deposition of pure, C-free Au films. Surface chemistry is completely suppressed on graphitized Pt(111) indicating physisorption of both precursors.
引用
收藏
页码:172 / 176
页数:5
相关论文
共 50 条
  • [21] PREPARATION OF ZNO FILMS BY LOW-PRESSURE ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITION
    KOBAYASHI, K
    MATSUBARA, T
    MATSUSHIMA, S
    OKADA, G
    CHEMISTRY LETTERS, 1993, (12) : 2133 - 2136
  • [22] ORGANOMETALLIC CHEMICAL-VAPOR-DEPOSITION OF THIN METAL-FILMS FOR MICROELECTRONICS APPLICATIONS
    NORMAN, JAT
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1995, 209 : 425 - INOR
  • [23] SELECTIVE METALLIZATION BY CHEMICAL-VAPOR-DEPOSITION
    GLADFELTER, WL
    CHEMISTRY OF MATERIALS, 1993, 5 (10) : 1372 - 1388
  • [24] LOW-TEMPERATURE ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF PLATINUM
    CHEN, YJ
    KAESZ, HD
    THRIDANDAM, H
    HICKS, RF
    APPLIED PHYSICS LETTERS, 1988, 53 (17) : 1591 - 1592
  • [25] CHEMICAL-VAPOR-DEPOSITION OF AROMATIC POLYMERS
    MOORE, JA
    LANG, CI
    LU, TM
    YANG, GR
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1995, 209 : 247 - PMSE
  • [26] UNDERSTANDING OF SURFACE-CHEMISTRY OF III-V METALORGANIC CHEMICAL VAPOR-DEPOSITION REACTANTS
    LUTH, H
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1989, 7 (03): : 696 - 700
  • [27] DIAMOND HOMOEPITAXY BY CHEMICAL-VAPOR-DEPOSITION
    BADZIAN, A
    BADZIAN, T
    DIAMOND AND RELATED MATERIALS, 1993, 2 (2-4) : 147 - 157
  • [28] ADVANCED MATERIALS AND CHEMICAL-VAPOR-DEPOSITION
    GREGORY, P
    ADVANCED MATERIALS, 1995, 7 (07) : 605 - 606
  • [29] CHEMICAL-VAPOR-DEPOSITION ON A SHOE STRING
    PAULSON, C
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1994, 208 : 158 - CHED
  • [30] SURFACE-REACTIONS AND GE CHEMICAL-VAPOR-DEPOSITION ON SILICON
    GREENLIEF, CM
    CHEN, L
    KEELING, LA
    DU, W
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1994, 207 : 37 - COLL