INCHWORM CONTROLLER FOR FINE APPROACH IN A SCANNING TUNNELING MICROSCOPE

被引：13

作者：

JEON, D

WILLIS, RF

机构：

[1] Department of Physics, The Pennsylvania State University, University Park

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 04期

关键词：

D O I：

10.1116/1.577292

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

This article addresses the problem of controlling the smooth approach of a scanning tunneling microscope using a commercial ferroelectric tube or "inchworm" device for both coarse and fine adjustment. A circuit is described for adapting the commercial control electronics such that the tip to sample approach time is less than 10 min with a fine control resolution of better than 1 angstrom to prevent the tip crashing into the surface.

引用

页码：2418 / 2419

页数：2