SOLID-PHASE EPITAXIAL REGROWTH OF SI1-XGEX/SI STRAINED-LAYER STRUCTURES AMORPHIZED BY ION-IMPLANTATION

被引：33

作者：

CHILTON, BT ^{[1
]}

ROBINSON, BJ ^{[1
]}

THOMPSON, DA ^{[1
]}

JACKMAN, TE ^{[1
]}

BARIBEAU, JM ^{[1
]}

机构：

[1] NATL RES COUNCIL CANADA,MICROSTRUCT SCI LAB,OTTAWA K1A 0R6,ONTARIO,CANADA

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 01期

关键词：

D O I：

10.1063/1.100828

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：42 / 44

页数：3

共 8 条

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