LIGHT-INDUCED DEGRADATION OF HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED AT DIFFERENT RF POWERS

被引：3

作者：

ACHARYA, PK ^{[1
]}

MALHOTRA, LK ^{[1
]}

CHOPRA, KL ^{[1
]}

机构：

[1] INDIAN INST TECHNOL,CTR MAT SCI & TECHNOL,NEW DELHI 110016,INDIA

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 11期

关键词：

D O I：

10.1063/1.342060

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6452 / 6455

页数：4

共 50 条

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