LIGHT-INDUCED DEGRADATION OF HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED AT DIFFERENT RF POWERS

被引：3

作者：

ACHARYA, PK ^{[1
]}

MALHOTRA, LK ^{[1
]}

CHOPRA, KL ^{[1
]}

机构：

[1] INDIAN INST TECHNOL,CTR MAT SCI & TECHNOL,NEW DELHI 110016,INDIA

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 11期

关键词：

D O I：

10.1063/1.342060

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6452 / 6455

页数：4

共 50 条

[41] LIGHT-INDUCED DEFECT STUDIES IN HYDROGENATED AMORPHOUS-SILICON BY EXOELECTRON EMISSION
BHIDE, RS
MANORAMA, V
PAWAR, SK
BABRAS, S
BHORASKAR, SV
BHIDE, VG
APPLIED PHYSICS LETTERS, 1990, 57 (15) : 1528 - 1530
[42] LIGHT-INDUCED DEFECTS IN PHOSPHORUS-DOPED HYDROGENATED AMORPHOUS-SILICON
OKUSHI, H
YAMASAKI, S
TANAKA, K
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1992, 141 (1-3) : 176 - 187
[43] ANNEALING BEHAVIOR OF LIGHT-INDUCED DEFECTS IN HYDROGENATED AMORPHOUS-SILICON ALLOYS
GUHA, S
HUANG, CY
HUDGENS, SJ
APPLIED PHYSICS LETTERS, 1984, 45 (01) : 50 - 51
[44] LIGHT-INDUCED EFFECTS IN HYDROGENATED AMORPHOUS-SILICON AT LOW-TEMPERATURES
LEE, C
YOON, JH
JANG, J
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 393 - 396
[45] LIGHT-INDUCED METASTABLE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON - A SYSTEMATIC STUDY
STUTZMANN, M
JACKSON, WB
TSAI, CC
PHYSICAL REVIEW B, 1985, 32 (01): : 23 - 47
[46] HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED IN A HELIUM ATMOSPHERE
CHU, TL
CHU, SS
ANG, ST
DUONG, A
HAN, YX
LIU, YH
JOURNAL OF APPLIED PHYSICS, 1986, 60 (12) : 4268 - 4272
[47] LIGHT-INDUCED EFFECTS ON DOPED-HYDROGENATED AND UNDOPED-HYDROGENATED AMORPHOUS-SILICON
PARK, JS
HAN, MK
LEE, CH
JOURNAL OF APPLIED PHYSICS, 1988, 64 (04) : 2107 - 2112
[48] REDUCED PHOTOINDUCED DEGRADATION IN CHEMICAL VAPOR-DEPOSITED HYDROGENATED AMORPHOUS-SILICON FILMS
CHU, TL
CHU, SS
BYLANDER, EG
ANG, ST
APPLIED PHYSICS LETTERS, 1988, 52 (10) : 807 - 809
[49] LIGHT-INDUCED CONDUCTIVITY CHANGES IN PHOSPHORUS-DOPED HYDROGENATED AMORPHOUS-SILICON
YOON, JH
KIM, MS
LEE, CC
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 114 : 636 - 638
[50] THE CARBON IMPURITY DEPENDENCE OF LIGHT-INDUCED METASTABLE EFFECTS IN HYDROGENATED AMORPHOUS-SILICON
UNOLD, T
COHEN, JD
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 114 : 603 - 605

← 1 2 3 4 5 →