LIGHT-INDUCED DEGRADATION OF HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED AT DIFFERENT RF POWERS

被引：3
|
作者：
ACHARYA, PK [1 ]
MALHOTRA, LK [1 ]
CHOPRA, KL [1 ]
机构：
[1] INDIAN INST TECHNOL,CTR MAT SCI & TECHNOL,NEW DELHI 110016,INDIA
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 11期
关键词：
D O I：
10.1063/1.342060
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：6452 / 6455
页数：4
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