LIGHT-INDUCED DEGRADATION OF HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED AT DIFFERENT RF POWERS

被引：3
|
作者：
ACHARYA, PK [1 ]
MALHOTRA, LK [1 ]
CHOPRA, KL [1 ]
机构：
[1] INDIAN INST TECHNOL,CTR MAT SCI & TECHNOL,NEW DELHI 110016,INDIA
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 11期
关键词：
D O I：
10.1063/1.342060
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：6452 / 6455
页数：4
相关论文
共 50 条
  • [31] LIGHT-INDUCED DEFECTS IN THERMAL ANNEALED HYDROGENATED AMORPHOUS-SILICON
    SERRA, J
    BERTOMEU, J
    SARDIN, G
    ROCH, C
    ASENSI, JM
    ANDREU, J
    MORENZA, JL
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1992, 28 (01) : 49 - 57
  • [32] LIGHT-INDUCED-CHANGES IN THE PHOTOCONDUCTIVITY OF RAPIDLY-DEPOSITED HYDROGENATED AMORPHOUS-SILICON FILMS
    LIN, XY
    WANG, H
    LIN, KX
    YU, YP
    FU, SL
    THIN SOLID FILMS, 1994, 237 (1-2) : 310 - 313
  • [33] ROLE OF THE HYDROGEN IN THE LIGHT-INDUCED DEFECTS IN UNDOPED HYDROGENATED AMORPHOUS-SILICON
    LABIDI, H
    ZELLAMA, K
    GERMAIN, P
    ASTIER, M
    LORTIGUES, D
    BARDELEBEN, JV
    THEYE, ML
    CHAHED, L
    GODET, C
    PHYSICA B, 1991, 170 (1-4): : 265 - 268
  • [34] LIGHT-INDUCED EFFECTS ON THE RAPIDLY COOLED STATE IN HYDROGENATED AMORPHOUS-SILICON
    YOON, JH
    KIM, MS
    LEE, CC
    PHYSICAL REVIEW B, 1989, 39 (14): : 10251 - 10253
  • [35] THE KINETICS OF FORMATION AND ANNEALING OF LIGHT-INDUCED DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
    STUTZMANN, M
    JACKSON, WB
    TSAI, CC
    AIP CONFERENCE PROCEEDINGS, 1984, (120) : 213 - 220
  • [36] SPATIAL-DISTRIBUTION OF LIGHT-INDUCED DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
    ZHOU, JH
    KUMEDA, M
    SHIMIZU, T
    APPLIED PHYSICS LETTERS, 1995, 66 (06) : 742 - 744
  • [37] LIGHT-INDUCED ANNEALING OF PHOTOCREATED DANGLING BONDS IN HYDROGENATED AMORPHOUS-SILICON
    ZHANG, Q
    NISHINO, T
    KUMEDA, M
    SHIMIZU, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1995, 34 (4B): : L483 - L486
  • [38] HIGH-TEMPERATURE LIGHT-INDUCED EFFECTS IN HYDROGENATED AMORPHOUS-SILICON
    YOON, JH
    LEE, C
    PHYSICAL REVIEW B, 1988, 38 (18): : 13453 - 13455
  • [39] THERMAL AND LASER TREATMENT OF LIGHT-INDUCED DEFECTS IN HYDROGENATED AMORPHOUS-SILICON
    BERTOLOTTI, M
    FERRARI, A
    EVANGELISTI, F
    FIORINI, P
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 90 (1-3) : 167 - 170
  • [40] ORIGIN OF SATURATED LIGHT-INDUCED DEFECT DENSITY IN HYDROGENATED AMORPHOUS-SILICON
    YOON, JH
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (03) : 1838 - 1843
12345