ELECTRICAL AND OPTICAL CHARACTERIZATION OF SBSNO2

被引：222

作者：

HE, YS

CAMPBELL, JC

MURPHY, RC

ARENDT, MF

SWINNEA, JS

机构：

[1] UNIV TEXAS,DEPT CHEM & BIOCHEM,AUSTIN,TX 78712

[2] UNIV TEXAS,DEPT MAT SCI & ENGN,AUSTIN,TX 78712

来源：

JOURNAL OF MATERIALS RESEARCH | 1993年 / 8卷 / 12期

关键词：

D O I：

10.1557/JMR.1993.3131

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Films of Sb:SnO2 have been formed by vacuum e-beam evaporation. The structural, electrical, and optical properties of these films have been investigated with respect to annealing time and temperature. After heat treatment in an oxygen atmosphere, thin films with a peak transmittance of 98% and 4-9 x 10(-3) OMEGAcm resistivity have been obtained. The barrier heights and energy band diagrams of Sb:SnO2/Si n-n and p-n heterojunctions have been determined by C-V measurements.

引用

收藏

页码：3131 / 3134

页数：4

相关论文

共 10 条

[1]

DHERE NG, 1988, VACUUM, V38, P755

[2] X-RAY PHOTOEMISSION SPECTROSCOPY STUDIES OF SN-DOPED INDIUM-OXIDE FILMS [J].

FAN, JCC ;

GOODENOUGH, JB .

JOURNAL OF APPLIED PHYSICS, 1977, 48 (08) :3524-3531

[3] SNO2-SI SOLAR-CELLS - HETEROSTRUCTURE OR SCHOTTKY-BARRIER OR MIS-TYPE DEVICE [J].

GHOSH, AK ;

FISHMAN, C ;

FENG, T .

JOURNAL OF APPLIED PHYSICS, 1978, 49 (06) :3490-3498

[4] METAL-SEMICONDUCTOR BARRIER HEIGHT MEASUREMENT BY DIFFERENTIAL CAPACITANCE METHOD - 1 CARRIER SYSTEM [J].

GOODMAN, AM .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (02) :329-&

[5] PHYSICAL-PROPERTIES OF THIN SNO2 AND SNO2-SB FILMS OBTAINED BY A PHOTOLYTIC METHOD [J].

KUKU, TA .

THIN SOLID FILMS, 1986, 142 (02) :241-250

[6] PREPARATION BY REACTIVE DEPOSITION AND SOME PHYSICAL-PROPERTIES OF AMORPHOUS TIN OXIDE-FILMS AND CRYSTALLINE SNO2 FILMS [J].

MURANAKA, S ;

BANDO, Y ;

TAKADA, T .

THIN SOLID FILMS, 1981, 86 (01) :11-19

[7]

MURTY NS, 1983, THIN SOLID FILMS, V108, P277, DOI 10.1016/0040-6090(83)90075-5

[8] ELECTRICAL AND OPTICAL PROPERTIES OF SI-SNO2 HETEROJUNCTIONS [J].

NISHINO, T ;

HAMAKAWA, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1970, 9 (09) :1085-&

[9] ELECTRICAL AND OPTICAL-PROPERTIES OF UNDOPED AND ANTIMONY-DOPED TIN OXIDE-FILMS [J].

SHANTHI, E ;

DUTTA, V ;

BANERJEE, A ;

CHOPRA, KL .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (12) :6243-6251

[10]

SITES JR, 1979, I PHYS C SER, V43, P741