FORMATION OF METASTABLE C49 STRUCTURE IN TITANIUM DISILICIDE FILMS

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作者：

MAKOGON, YN

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来源：

INORGANIC MATERIALS | 1992年 / 28卷 / 08期

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中图分类号：

T [工业技术];

学科分类号：

08 ;

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引用

页码：1315 / 1320

页数：6

共 12 条

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[2]

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[3]

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[4]

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[6]

MAKOGON YN, 1991, IAN SSSR NEORG MATER, V24, P18

[7] INTERACTIONS OF THIN TI FILMS WITH SI, SIO2, SI3N4, AND SIOXNY UNDER RAPID THERMAL ANNEALING [J].

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[8]

MURARKA SR, 1986, SILICIDES VERY LARGE

[9]

Nikolin B. I., 1971, Fizika Metallov i Metallovedenie, V32, P871

[10]

NIKOLIN BI, 1975, FIZ MET METALLOVED+, V39, P124

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