SILICON-WAFERS SELF-BONDING

被引：2
作者：
MISEREY, F
机构：
来源：
REVUE DE PHYSIQUE APPLIQUEE | 1990年 / 25卷 / 07期
关键词：
D O I：
10.1051/rphysap:01990002507076300
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：763 / 773
页数：11
相关论文
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