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PREFERENTIAL ETCHING AND ETCHED PROFILE OF GAAS
被引:146
作者
:
TARUI, Y
论文数:
0
引用数:
0
h-index:
0
TARUI, Y
KOMIYA, Y
论文数:
0
引用数:
0
h-index:
0
KOMIYA, Y
HARADA, Y
论文数:
0
引用数:
0
h-index:
0
HARADA, Y
机构
:
来源
:
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
|
1971年
/ 118卷
/ 01期
关键词
:
D O I
:
10.1149/1.2407921
中图分类号
:
O646 [电化学、电解、磁化学];
学科分类号
:
081704 ;
摘要
:
引用
收藏
页码:118 / &
相关论文
共 10 条
[1]
BEAR KE, 1969, P IEEE, V57, P1469
[2]
LSA OSCILLATOR-DIODE THEORY
COPELAND, JA
论文数:
0
引用数:
0
h-index:
0
COPELAND, JA
[J].
JOURNAL OF APPLIED PHYSICS,
1967,
38
(08)
: 3096
-
+
[3]
A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON
FINNE, RM
论文数:
0
引用数:
0
h-index:
0
FINNE, RM
KLEIN, DL
论文数:
0
引用数:
0
h-index:
0
KLEIN, DL
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1967,
114
(09)
: 965
-
&
[4]
A POLISHING ETCHANT FOR III-V SEMICONDUCTORS
FULLER, CS
论文数:
0
引用数:
0
h-index:
0
FULLER, CS
ALLISON, HW
论文数:
0
引用数:
0
h-index:
0
ALLISON, HW
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(09)
: 880
-
880
[5]
ETCHING AND INHIBITION OF THE (III) SURFACES OF THE III-V INTERMETALLIC COMPOUNDS - INSB
GATOS, HC
论文数:
0
引用数:
0
h-index:
0
GATOS, HC
LAVINE, MC
论文数:
0
引用数:
0
h-index:
0
LAVINE, MC
[J].
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS,
1960,
14
: 169
-
&
[6]
CHARACTERISTICS OF THE (111) SURFACES OF THE III-V INTERMETALLIC COMPOUNDS
GATOS, HC
论文数:
0
引用数:
0
h-index:
0
GATOS, HC
LAVINE, MC
论文数:
0
引用数:
0
h-index:
0
LAVINE, MC
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1960,
107
(05)
: 427
-
433
[7]
INSTABILITIES OF CURRENT IN 3-V SEMICONDUCTORS
GUNN, JB
论文数:
0
引用数:
0
h-index:
0
GUNN, JB
[J].
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1964,
8
(02)
: 141
-
&
[8]
SUPPRESSION OF TRAVELLING HIGH-FIELD-DOMAIN MODE OSCILLATIONS IN GAAS BY DIELECTRIC SURFACE LOADING
KATAOKA, S
论文数:
0
引用数:
0
h-index:
0
机构:
Electrotechnical Laboratory Ministry of International Trade & Industry Tanashi, Tokyo
KATAOKA, S
TATENO, H
论文数:
0
引用数:
0
h-index:
0
机构:
Electrotechnical Laboratory Ministry of International Trade & Industry Tanashi, Tokyo
TATENO, H
KAWASHIM.M
论文数:
0
引用数:
0
h-index:
0
机构:
Electrotechnical Laboratory Ministry of International Trade & Industry Tanashi, Tokyo
KAWASHIM.M
[J].
ELECTRONICS LETTERS,
1969,
5
(03)
: 48
-
&
[9]
EFFECT OF SMALL TRANSVERSE DIMENSIONS ON OPERATION OF GUNN DEVICES
KINO, GS
论文数:
0
引用数:
0
h-index:
0
KINO, GS
ROBSON, PN
论文数:
0
引用数:
0
h-index:
0
ROBSON, PN
[J].
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS,
1968,
56
(11):
: 2056
-
+
[10]
ANISOTROPIC ETCHING OF SILICON
LEE, DB
论文数:
0
引用数:
0
h-index:
0
机构:
Semiconductor Laboratories, General Electric Company Limited, Hirst Research Centre, Wembley
LEE, DB
[J].
JOURNAL OF APPLIED PHYSICS,
1969,
40
(11)
: 4569
-
&
←
1
→
共 10 条
[1]
BEAR KE, 1969, P IEEE, V57, P1469
[2]
LSA OSCILLATOR-DIODE THEORY
COPELAND, JA
论文数:
0
引用数:
0
h-index:
0
COPELAND, JA
[J].
JOURNAL OF APPLIED PHYSICS,
1967,
38
(08)
: 3096
-
+
[3]
A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON
FINNE, RM
论文数:
0
引用数:
0
h-index:
0
FINNE, RM
KLEIN, DL
论文数:
0
引用数:
0
h-index:
0
KLEIN, DL
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1967,
114
(09)
: 965
-
&
[4]
A POLISHING ETCHANT FOR III-V SEMICONDUCTORS
FULLER, CS
论文数:
0
引用数:
0
h-index:
0
FULLER, CS
ALLISON, HW
论文数:
0
引用数:
0
h-index:
0
ALLISON, HW
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1962,
109
(09)
: 880
-
880
[5]
ETCHING AND INHIBITION OF THE (III) SURFACES OF THE III-V INTERMETALLIC COMPOUNDS - INSB
GATOS, HC
论文数:
0
引用数:
0
h-index:
0
GATOS, HC
LAVINE, MC
论文数:
0
引用数:
0
h-index:
0
LAVINE, MC
[J].
JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS,
1960,
14
: 169
-
&
[6]
CHARACTERISTICS OF THE (111) SURFACES OF THE III-V INTERMETALLIC COMPOUNDS
GATOS, HC
论文数:
0
引用数:
0
h-index:
0
GATOS, HC
LAVINE, MC
论文数:
0
引用数:
0
h-index:
0
LAVINE, MC
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1960,
107
(05)
: 427
-
433
[7]
INSTABILITIES OF CURRENT IN 3-V SEMICONDUCTORS
GUNN, JB
论文数:
0
引用数:
0
h-index:
0
GUNN, JB
[J].
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1964,
8
(02)
: 141
-
&
[8]
SUPPRESSION OF TRAVELLING HIGH-FIELD-DOMAIN MODE OSCILLATIONS IN GAAS BY DIELECTRIC SURFACE LOADING
KATAOKA, S
论文数:
0
引用数:
0
h-index:
0
机构:
Electrotechnical Laboratory Ministry of International Trade & Industry Tanashi, Tokyo
KATAOKA, S
TATENO, H
论文数:
0
引用数:
0
h-index:
0
机构:
Electrotechnical Laboratory Ministry of International Trade & Industry Tanashi, Tokyo
TATENO, H
KAWASHIM.M
论文数:
0
引用数:
0
h-index:
0
机构:
Electrotechnical Laboratory Ministry of International Trade & Industry Tanashi, Tokyo
KAWASHIM.M
[J].
ELECTRONICS LETTERS,
1969,
5
(03)
: 48
-
&
[9]
EFFECT OF SMALL TRANSVERSE DIMENSIONS ON OPERATION OF GUNN DEVICES
KINO, GS
论文数:
0
引用数:
0
h-index:
0
KINO, GS
ROBSON, PN
论文数:
0
引用数:
0
h-index:
0
ROBSON, PN
[J].
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS,
1968,
56
(11):
: 2056
-
+
[10]
ANISOTROPIC ETCHING OF SILICON
LEE, DB
论文数:
0
引用数:
0
h-index:
0
机构:
Semiconductor Laboratories, General Electric Company Limited, Hirst Research Centre, Wembley
LEE, DB
[J].
JOURNAL OF APPLIED PHYSICS,
1969,
40
(11)
: 4569
-
&
←
1
→