ROLE OF CHLORINE IN SILICON OXIDATION .2.

被引：0

作者：

MONKOWSKI, J ^{[1
]}

机构：

[1] CATHOLIC UNIV NIJMEGEN,NIJMEGEN,NETHERLANDS

来源：

关键词：

Compendex;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

SEMICONDUCTOR DEVICE MANUFACTURE

引用

页码：113 / 119

页数：7

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