THERMALLY EXCITED RESONATING MEMBRANE MASS-FLOW SENSOR

被引：23
作者：
BOUWSTRA, S
KEMNA, P
LEGTENBERG, R
机构：
来源：
SENSORS AND ACTUATORS | 1989年 / 20卷 / 03期
关键词：
D O I：
10.1016/0250-6874(89)80119-2
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：213 / 223
页数：11
相关论文
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