IMPROVED THIN-FILM AL2O3 CAPACITORS

被引：5
|
作者：
RAO, MK
JAWALEKAR, SR
机构：
来源：
THIN SOLID FILMS | 1978年 / 51卷 / 02期
关键词：
D O I：
10.1016/0040-6090(78)90352-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：185 / 188
页数：4
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