IMPROVED THIN-FILM AL2O3 CAPACITORS

被引：5
|
作者：
RAO, MK
JAWALEKAR, SR
机构：
来源：
THIN SOLID FILMS | 1978年 / 51卷 / 02期
关键词：
D O I：
10.1016/0040-6090(78)90352-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：185 / 188
页数：4
相关论文
共 50 条
  • [1] THIN-FILM AL-2O-3 CAPACITORS
    AJIT, CN
    JAWALEKAR, SR
    THIN SOLID FILMS, 1976, 37 (01) : 83 - 89
  • [2] THIN-FILM AL/AL2O3/TE METAL-INSULATOR SEMICONDUCTOR CAPACITORS
    SZARO, L
    THIN SOLID FILMS, 1984, 112 (01) : 1 - 5
  • [3] AGING MECHANISMS IN THIN-FILM AL-AL2O3-AL CAPACITORS
    BERLICKI, TM
    OSADNIK, SJ
    THIN SOLID FILMS, 1976, 36 (02) : 349 - 351
  • [4] A STUDY OF THE TI/AL2O3 THIN-FILM COMPOSITE
    PEDDADA, RS
    BIRNBAUM, HK
    ROBERTSON, IM
    JOURNAL OF METALS, 1988, 40 (11): : 80 - 80
  • [5] RELATIONS BETWEEN THE PARAMETERS OF THIN-FILM AL-AL2O3-METAL CAPACITORS
    BERLICKI, T
    THIN SOLID FILMS, 1980, 66 (02) : L15 - L18
  • [6] COMPLEX IMPEDANCE STUDY FOR AL/DY2O3/AL THIN-FILM CAPACITORS
    WIKTORCZYK, T
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1993, 139 (02): : 397 - 411
  • [7] ANOMALOUS DRIFT IN CDSE/AL2O3 THIN-FILM TRANSISTORS
    GREVE, DW
    SACCAMANGO, MJ
    LUO, FC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (03) : C90 - C90
  • [8] Improved Performance and Bias Stability of Al2O3/IZO Thin-Film Transistors with Vertical Diffusion
    Lee, Se-Hyeong
    Bak, So-Young
    Yi, Moonsuk
    ELECTRONICS, 2022, 11 (14)
  • [9] Volume and interfacial dielectric properties of Al/Ho2O3/Al thin-film capacitors
    Wiktorczyk, T
    JOURNAL OF ELECTROSTATICS, 2001, 51 (1-4) : 131 - 136
  • [10] Control of Threshold Voltage in ZnO/Al2O3 Thin-Film Transistors through Al2O3 Growth Temperature
    Baek, Dongki
    Lee, Se-Hyeong
    Bak, So-Young
    Jang, Hyeongrok
    Lee, Jinwoo
    Yi, Moonsuk
    ELECTRONICS, 2024, 13 (08)
12345