METALORGANIC VAPOR-PHASE EPITAXIAL-GROWTH AND PROPERTIES OF GAN/AL0.1GA0.9N LAYERED STRUCTURES

被引：85
作者：
ITOH, K
KAWAMOTO, T
AMANO, H
HIRAMATSU, K
AKASAKI, I
机构：
[1] Department of Electronics, School of Engineering, Nagoya University, Chikusa-ku, Nagoya, 464-01, Furo-cho
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 9A期
关键词：
GAN/AL0.1GA0.9N LAYERED STRUCTURE; SURFACE FLATNESS; SATELLITE PEAKS OF X-RAY ROCKING CURVE; GAN WELL LAYER; PHOTOLUMINESCENCE PEAK SHIFT;
D O I：
10.1143/JJAP.30.1924
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
High-quality, well-controlled GaN/Al0.1Ga0.9N layered structures with periodicity varying from 4.5 nm to 60 nm have been successfully grown on (0001) sapphire substrates by Metalorganic Vapor Phase Epitaxy (MOVPE). The layered structure has been confirmed by double-crystal X-ray diffractometry. Photoluminescence peak energy showed a shift toward the higher-energy side with decreasing thickness of the GaN well layer, which is in good agreement with the calculation obtained from the Kronig-Penny analysis.
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页码：1924 / 1927
页数：4
相关论文
共 16 条
[1]   EFFECTS OF THE BUFFER LAYER IN METALORGANIC VAPOR-PHASE EPITAXY OF GAN ON SAPPHIRE SUBSTRATE [J].
AMANO, H ;
AKASAKI, I ;
HIRAMATSU, K ;
KOIDE, N ;
SAWAKI, N .
THIN SOLID FILMS, 1988, 163 :415-420
[2]   METALORGANIC VAPOR-PHASE EPITAXIAL-GROWTH OF A HIGH-QUALITY GAN FILM USING AN AIN BUFFER LAYER [J].
AMANO, H ;
SAWAKI, N ;
AKASAKI, I ;
TOYODA, Y .
APPLIED PHYSICS LETTERS, 1986, 48 (05) :353-355
[3]  
Cunningham RD, 1972, J LUMIN, V5, P21, DOI [10.1016/0022-2313(72)90032-4, DOI 10.1016/0022-2313(72)90032-4]
[4]  
DINGLE R, 1987, SEMICONDUCTORS SEMIM, V24, pCH1
[5]   COMPOSITION AND LATTICE-MISMATCH MEASUREMENT OF THIN SEMICONDUCTOR LAYERS BY X-RAY-DIFFRACTION [J].
FEWSTER, PF ;
CURLING, CJ .
JOURNAL OF APPLIED PHYSICS, 1987, 62 (10) :4154-4158
[6]  
FEWSTER PF, 1986, PHILIPS J RES, V41, P268
[7]   EFFECT OF WELL SIZE FLUCTUATION ON PHOTO-LUMINESCENCE SPECTRUM OF ALAS-GAAS SUPER-LATTICES [J].
GOLDSTEIN, L ;
HORIKOSHI, Y ;
TARUCHA, S ;
OKAMOTO, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1983, 22 (10) :1489-1492
[8]   GROWTH AND PROPERTIES OF GAXAL1-XN COMPOUNDS [J].
HAGEN, J ;
METCALFE, RD ;
WICKENDEN, D ;
CLARK, W .
JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1978, 11 (04) :L143-L146
[9]  
Harrison W. A., 1980, ELECTRONIC STRUCTURE, P253
[10]  
ITOH K, 1990, J CRYST GROWTH, V104, P533
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