COMPUTER MODELING OF DEPOSITION OF A1AS1-XPX, GAAS1-XPX, INAS1-XPX SOLID-SOLUTIONS FROM COMPLEX VAPOR MIXTURE CONTAINING ORGANOMETALLIC COMPOUNDS

被引：0

作者：

GLAZOV, VM

PVALOVA, LM

BARANOV, SG

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来源：

INORGANIC MATERIALS | 1990年 / 26卷 / 03期

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中图分类号：

T [工业技术];

学科分类号：

08 ;

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页码：397 / 401

页数：5

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