STRUCTURE AND PROPERTIES OF TRANSPARENT AND HARD CARBON-FILMS

被引：44

作者：

BEWILOGUA, K

DIETRICH, D

PAGEL, L

SCHURER, C

WEISSMANTEL, C

机构：

来源：

SURFACE SCIENCE | 1979年 / 86卷 / JUL期

关键词：

D O I：

10.1016/0039-6028(79)90408-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：308 / 313

页数：6

共 12 条

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[4]

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[6]

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[8] ION-BEAM-DEPOSITED POLYCRYSTALLINE DIAMONDLIKE FILMS [J].

SPENCER, EG ;

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JOY, DC ;

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APPLIED PHYSICS LETTERS, 1976, 29 (02) :118-120

[9] ENERGIES OF IONS AND NEUTRALS IN ION PLATING [J].

TEER, DG .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1976, 9 (15) :L187-L189

[10] ION-BEAM TECHNIQUES FOR THIN AND THICK-FILM DEPOSITION [J].

WEISSMANTEL, C ;

ERLER, HJ ;

REISSE, G .

SURFACE SCIENCE, 1979, 86 (JUL) :207-221

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