MESOSCOPIC SILICON COUPLED SUPERCONDUCTING JUNCTIONS OF COSI2 FORMED IN A SELF-ALIGNED PROCESS

Coplanar superconductor-semiconductor-superconductor junctions are fabricated using CoSi2 as a superconductor and heavily doped Si as a semiconductor. The CoSi2 is formed in a self-aligned process. In this article the fabrication process of the junctions is presented. Two types of samples are fabricated. The current path of samples of the first type is not well defined. Additional fabrication steps are done to constrict the current path of the second type of samples to the small silicon link. Measurements on both types of samples are presented. Supercurrent and characteristic behaviour in the voltage carrying state (subharmonic gap structure) is measured and analysed on samples with a well defined current path.