KINETIC ASPECTS OF SOLID-PHASE EPITAXIAL-GROWTH OF AMORPHOUS SI

被引：0
|
作者：
LIAU, ZL
LAU, SS
NICOLET, MA
MAYER, JW
BLATTNER, RJ
WILLIAMS, P
EVANS, CA
机构：
[1] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
[2] UNIV ILLINOIS,SCH CHEM SCI,URBANA,IL 61801
来源：
NUCLEAR INSTRUMENTS & METHODS | 1978年 / 149卷 / 1-3期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：623 / 627
页数：5
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