NEW ELECTRON AND HOLE SPECTROSCOPIES BASED ON BALLISTIC ELECTRON-EMISSION MICROSCOPY

被引:31
作者
BELL, LD [1 ]
KAISER, WJ [1 ]
HECHT, MH [1 ]
DAVIS, LC [1 ]
机构
[1] FORD MOTOR CO,RES STAFF,DEARBORN,MI 48121
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1991年 / 9卷 / 02期
关键词
D O I
10.1116/1.585466
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ballistic electron emission microscopy (BEEM) is shown to be one of a class of carrier transport nanospectroscopies which measure both elastic and inelastic transport of electrons and holes in thin film structures. In BEEM, electrons are injected into a metal film from a tunnel tip and are collected in the substrate after ballistic transport through the film. An analogous spectroscopy can be performed using hole transport into a p-type semiconductor substrate. In the present work, it is shown that inelastic scattering in metal films results in electron-hole pair creation which can be detected by similar techniques. A theory for this spectroscopy successfully explains the experimental results.
引用
收藏
页码:594 / 600
页数:7
相关论文
共 13 条
[1]   DIRECT SPECTROSCOPY OF ELECTRON AND HOLE SCATTERING [J].
BELL, LD ;
HECHT, MH ;
KAISER, WJ ;
DAVIS, LC .
PHYSICAL REVIEW LETTERS, 1990, 64 (22) :2679-2682
[2]   OBSERVATION OF INTERFACE BAND-STRUCTURE BY BALLISTIC-ELECTRON-EMISSION MICROSCOPY [J].
BELL, LD ;
KAISER, WJ .
PHYSICAL REVIEW LETTERS, 1988, 61 (20) :2368-2371
[3]  
Grunthaner F. J., 1986, Material Science Reports, V1, P65, DOI 10.1016/S0920-2307(86)80001-9
[4]   BALLISTIC-HOLE SPECTROSCOPY OF INTERFACES [J].
HECHT, MH ;
BELL, LD ;
KAISER, WJ ;
DAVIS, LC .
PHYSICAL REVIEW B, 1990, 42 (12) :7663-7666
[5]   BALLISTIC-ELECTRON-EMISSION MICROSCOPY INVESTIGATION OF SCHOTTKY-BARRIER INTERFACE FORMATION [J].
HECHT, MH ;
BELL, LD ;
KAISER, WJ ;
GRUNTHANER, FJ .
APPLIED PHYSICS LETTERS, 1989, 55 (08) :780-782
[6]   RELIABLE AND VERSATILE SCANNING TUNNELING MICROSCOPE [J].
KAISER, WJ ;
JAKLEVIC, RC .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (04) :537-540
[7]   DIRECT INVESTIGATION OF SUBSURFACE INTERFACE ELECTRONIC-STRUCTURE BY BALLISTIC-ELECTRON-EMISSION MICROSCOPY [J].
KAISER, WJ ;
BELL, LD .
PHYSICAL REVIEW LETTERS, 1988, 60 (14) :1406-1409
[8]  
Lee E, UNPUB
[9]   ELECTRON SELF-ENERGY APPROACH TO CORRELATION IN A DEGENERATE ELECTRON GAS [J].
QUINN, JJ ;
FERRELL, RA .
PHYSICAL REVIEW, 1958, 112 (03) :812-827
[10]  
RHODERICK EH, 1988, METAL SEMICONDUCTOR, P116