PECULIARITIES OF SILICON AMORPHIZATION AT ION-BOMBARDMENT

被引：43
作者：
GERASIMOV, AI
ZORIN, EI
TETELBAUM, DI
PAVLOV, PV
机构：
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 1972年 / 12卷 / 02期
关键词：
D O I：
10.1002/pssa.2210120242
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：679 / +
页数：1
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