MECHANISTIC AND RESPONSE STUDIES OF IRIDIUM OXIDE PH SENSORS

被引:61
作者
TARLOV, MJ
SEMANCIK, S
KREIDER, KG
机构
[1] Chemical Process Metrology Division, National Institute of Standards and Technology, Gaithersburg
关键词
D O I
10.1016/0925-4005(90)80218-O
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Results are presented on the pH-potential response of iridium oxide films prepared by d.c. magnetron reactive sputtering. Freshly deposited films exhibit a nearly Nernstian response to pH and little hysteresis. The redox sensitivity of films prepared by sputtering in water-saturated oxygen and annealed in an oxygen atmosphere has been examined as well. In addition, methods are described for preparing model iridium oxide sensor surfaces for ultrahigh vacuum surface analytical studies. Stoichiometric IrO2-like surfaces are shown to be relatively inert to gas phase water. Hydroxylation of IrO2-like surfaces can be induced, however, by r.f. water plasma treatment. © 1990.
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页码:293 / 297
页数:5
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