ION-CHANNELING AND OPTICAL-ABSORPTION STUDIES OF IMPLANTATION DISORDER IN GERMANIUM

被引:4
|
作者
PICRAUX, ST [1 ]
STEIN, HJ [1 ]
机构
[1] SANDIA LABS,ALBUQUERQUE,NM 87115
关键词
D O I
10.1063/1.1663860
中图分类号
O59 [应用物理学];
学科分类号
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页码:3784 / 3788
页数:5
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